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Handbook for Cleaning for Semiconductor Manufacturing

- Fundamentals and Applications

About Handbook for Cleaning for Semiconductor Manufacturing

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

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  • Language:
  • English
  • ISBN:
  • 9780470625958
  • Binding:
  • Hardback
  • Pages:
  • 614
  • Published:
  • February 4, 2011
  • Dimensions:
  • 263x185x43 mm.
  • Weight:
  • 1276 g.
Delivery: 2-4 weeks
Expected delivery: April 21, 2024

Description of Handbook for Cleaning for Semiconductor Manufacturing

This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.

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