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Advances in Research and Development

- Modeling of Film Deposition for Microelectronic Applications

part of the Thin Films series

About Advances in Research and Development

The progress in device technologies are surveyed in this volume. Included are Si/ (Si-Ge) heterojunctions for high-speed integrated circuits, Schottky-barrier arrays in Si and Si-Ge alloys for infrared imaging, and III-V quantum-well detector structures operated in the heterodyne mode.

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  • Language:
  • English
  • ISBN:
  • 9780125330237
  • Binding:
  • Hardback
  • Pages:
  • 311
  • Published:
  • November 13, 1997
  • Dimensions:
  • 152x229x22 mm.
  • Weight:
  • 630 g.
Delivery: 2-3 weeks
Expected delivery: January 10, 2025
Extended return policy to January 30, 2025
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Description of Advances in Research and Development

The progress in device technologies are surveyed in this volume. Included are Si/ (Si-Ge) heterojunctions for high-speed integrated circuits, Schottky-barrier arrays in Si and Si-Ge alloys for infrared imaging, and III-V quantum-well detector structures operated in the heterodyne mode.

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