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This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.
This book examines electric and magnetic field synthesis, with special emphasis on the optimal shape design of devices when conflicting objectives are to be fulfilled. It features a problem-solving approach which offers examples solved by various methods.
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