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MEMS: Field Models and Optimal Design

About MEMS: Field Models and Optimal Design

This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.

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  • Language:
  • English
  • ISBN:
  • 9783030214982
  • Binding:
  • Paperback
  • Pages:
  • 190
  • Published:
  • August 13, 2020
  • Edition:
  • 12020
  • Dimensions:
  • 155x235x0 mm.
  • Weight:
  • 454 g.
Delivery: 2-4 weeks
Expected delivery: December 18, 2024

Description of MEMS: Field Models and Optimal Design

This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.

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