Books in the Microtechnology and MEMS series

This book presents the basics and methods of nanoscale analytical techniques for tribology field. The applied methods are atom probe tomography, in situ TEM, SERS, NEXAFS, in situ XPS, nanoindentation and in situ Raman spectroscopy.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.

Surface Tension in Microsystems

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.

This book introduces the fundamentals of piezotronics and piezo-phototronics, and shows how the functionality of piezotroics and piezo-phototronics are complementary to CMOS technology. Describes applications in sensing, nanorobotics and many other areas.

This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems.

This tutorial book offers an in-depth overview of the fundamental principles of micro/nano technologies and devices related to sensing, actuation and diagnosis in fluidics and biosystems.