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Micromachines as Tools for Nanotechnology

part of the Microtechnology and MEMS series

Micromachines as Tools for Nanotechnology
About Micromachines as Tools for Nanotechnology

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.

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  • Language:
  • English
  • ISBN:
  • 9783642624650
  • Binding:
  • Paperback
  • Pages:
  • 211
  • Published:
  • October 28, 2012
  • Edition:
  • 12003
  • Dimensions:
  • 242x158x18 mm.
  • Weight:
  • 354 g.
Delivery: 1-2 weeks
Expected delivery: December 7, 2024

Description of Micromachines as Tools for Nanotechnology

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.

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