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Computational Lithography

By Xu Ma
About Computational Lithography

This is the first book to address the optimization of resolution enhancement techniques in optical lithography. It provides an in-depth discussion of RET tools that use model-based mathematical optimization approaches.

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  • Language:
  • English
  • ISBN:
  • 9780470596975
  • Binding:
  • Hardback
  • Pages:
  • 256
  • Published:
  • August 5, 2010
  • Dimensions:
  • 160x241x18 mm.
  • Weight:
  • 508 g.
Delivery: 2-4 weeks
Expected delivery: December 22, 2024
Extended return policy to January 30, 2025

Description of Computational Lithography

This is the first book to address the optimization of resolution enhancement techniques in optical lithography. It provides an in-depth discussion of RET tools that use model-based mathematical optimization approaches.

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