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Computational Lithography
part of the Wiley Series in Pure and Applied Optics series
- Binding:
- Hardback
- Pages:
- 256
- Published:
- August 6, 2010
- Dimensions:
- 160x241x18 mm.
- Weight:
- 508 g.
Delivery:
2-4 weeks
Expected delivery: October 12, 2024
Description of Computational Lithography
This is the first book to address the optimization of resolution enhancement techniques in optical lithography. It provides an in-depth discussion of RET tools that use model-based mathematical optimization approaches.
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