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Digital Holography for MEMS and Microsystem Metrology
- Binding:
- Hardback
- Pages:
- 232
- Published:
- July 27, 2011
- Dimensions:
- 164x237x19 mm.
- Weight:
- 486 g.
Delivery:
2-4 weeks
Expected delivery: February 6, 2025
About Anand (Nanyang Technological University Asundi
View all books by Anand (Nanyang Technological University AsundiDescription of Digital Holography for MEMS and Microsystem Metrology
By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.
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