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Environmental, Safety, and Health Issues in IC Production: Volume 447
part of the MRS Proceedings series
- Binding:
- Hardback
- Pages:
- 168
- Published:
- June 4, 1997
- Dimensions:
- 160x237x15 mm.
- Weight:
- 400 g.
Delivery:
2-3 weeks
Expected delivery: January 10, 2025
Extended return policy to January 30, 2025
Description of Environmental, Safety, and Health Issues in IC Production: Volume 447
This book provides an overview of the available scientific information on environmentally benign IC production. A broad range of topics is addressed including work on resource reduction for chemicals, gases and DI water, reuse or recycling of chemicals, waste treatment strategies, environmentally friendly alternative technologies and analytical technologies for environmental studies.
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