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Fabrication Engineering at the Micro- and Nanoscale
- Binding:
- Paperback
- Pages:
- 688
- Published:
- December 19, 2012
- Edition:
- 4
- Dimensions:
- 236x192x26 mm.
- Weight:
- 1075 g.
Delivery:
2-4 weeks
Expected delivery: December 8, 2024
Description of Fabrication Engineering at the Micro- and Nanoscale
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
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