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Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1
- Microlithography
part of the Press Monographs series
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- Binding:
- Paperback
- Pages:
- 776
- Published:
- March 30, 1997
- Dimensions:
- 152x229x0 mm.
- Weight:
- 1380 g.
Delivery:
2-4 weeks
Expected delivery: October 26, 2024
Description of Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. This volume contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
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