Handbook of Optical Dimensional Metrology

Requiring no prior expertise in optical dimensional metrology, this handbook helps readers understand the capabilities and limitations of optical metrology methods. It shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems. After building a foundation for evaluating optical measurement methods, the book focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. Best practices and practical examples aid readers in effectively using the methods.