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Introductory MEMS
- Fabrication and Applications
- Binding:
- Paperback
- Pages:
- 440
- Published:
- September 6, 2014
- Edition:
- 2010
- Dimensions:
- 155x235x24 mm.
- Weight:
- 700 g.
Delivery:
2-4 weeks
Expected delivery: December 18, 2024
Description of Introductory MEMS
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
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