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Ion-Solid Interactions

- Fundamentals and Applications

About Ion-Solid Interactions

This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.

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  • Language:
  • English
  • ISBN:
  • 9780521616065
  • Binding:
  • Paperback
  • Pages:
  • 572
  • Published:
  • December 2, 2004
  • Dimensions:
  • 164x232x35 mm.
  • Weight:
  • 880 g.
Delivery: 1-2 weeks
Expected delivery: October 3, 2024

Description of Ion-Solid Interactions

This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.

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