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Laser Heat-Mode Lithography
- Principle and Methods
part of the Springer Series in Materials Science series
- Binding:
- Paperback
- Pages:
- 208
- Published:
- November 29, 2020
- Edition:
- 12019
- Dimensions:
- 155x235x0 mm.
- Weight:
- 454 g.
Delivery:
2-4 weeks
Expected delivery: October 24, 2024
Description of Laser Heat-Mode Lithography
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.
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