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Machine Learning-Based Modelling in Atomic Layer Deposition Processes
part of the Emerging Materials and Technologies series
- Binding:
- Hardback
- Pages:
- 354
- Published:
- December 15, 2023
- Dimensions:
- 156x0x234 mm.
- Weight:
- 852 g.
Delivery:
2-3 weeks
Expected delivery: June 6, 2024
Description of Machine Learning-Based Modelling in Atomic Layer Deposition Processes
This book describes the application of machine learning modelling approaches in atomic layer deposition and presents detailed information on modelling, optimization, and prediction of the behaviour and characteristics of ALD for improved process quality control.
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