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Materials and Failures in MEMS and NEMS
- Binding:
- Hardback
- Pages:
- 432
- Published:
- September 27, 2015
- Dimensions:
- 185x262x28 mm.
- Weight:
- 934 g.
Delivery:
2-4 weeks
Expected delivery: December 20, 2024
Description of Materials and Failures in MEMS and NEMS
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.
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