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Mechanical Properties of Silicon Based Compounds: Silicides
part of the Engineering Materials series
- Binding:
- Paperback
- Pages:
- 274
- Published:
- August 13, 2020
- Edition:
- 12019
- Dimensions:
- 155x235x0 mm.
- Weight:
- 454 g.
Delivery:
2-4 weeks
Expected delivery: December 18, 2024
Description of Mechanical Properties of Silicon Based Compounds: Silicides
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.
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