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About MEMS and NEMS

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience.

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  • Language:
  • English
  • ISBN:
  • 9780849312625
  • Binding:
  • Hardback
  • Pages:
  • 461
  • Published:
  • January 17, 2002
  • Dimensions:
  • 156x234x34 mm.
  • Weight:
  • 1040 g.
Delivery: 2-3 weeks
Expected delivery: December 12, 2024

Description of MEMS and NEMS

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience.

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