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MEMS and NEMS
- Systems, Devices, and Structures
- Binding:
- Hardback
- Pages:
- 461
- Published:
- January 17, 2002
- Dimensions:
- 156x234x34 mm.
- Weight:
- 1040 g.
Delivery:
2-3 weeks
Expected delivery: January 15, 2025
About Sergey Edward (Rochester Institute of Technology Lyshevski
View all books by Sergey Edward (Rochester Institute of Technology LyshevskiDescription of MEMS and NEMS
The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience.
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