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Metal Impurities in Silicon-Device Fabrication
part of the Springer Series in Materials Science series
- Language:
- English
- ISBN:
- 9783540642138
- Binding:
- Hardback
- Pages:
- 270
- Published:
- February 17, 2000
- Edition:
- 2
- Dimensions:
- 155x235x0 mm.
- Weight:
- 606 g.
Delivery:
2-3 weeks
Expected delivery: December 5, 2024
Description of Metal Impurities in Silicon-Device Fabrication
This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. This new edition includes important recent data and many new tables.
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