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Micro and Nano Fabrication
- Tools and Processes
- Language:
- English
- ISBN:
- 9783662443941
- Binding:
- Hardback
- Pages:
- 519
- Published:
- January 19, 2015
- Edition:
- 2015
- Dimensions:
- 164x240x31 mm.
- Weight:
- 952 g.
Delivery:
2-3 weeks
Expected delivery: August 2, 2025
Description of Micro and Nano Fabrication
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
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