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Nano- and Micro-Electromechanical Systems

- Fundamentals of Nano- and Microengineering, Second Edition

About Nano- and Micro-Electromechanical Systems

Introduces concepts, methods, techniques, and technologies that are needed to solve a wide variety of problems related to high-performance nano- and micro systems. This book builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices.

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  • Language:
  • English
  • ISBN:
  • 9780849328381
  • Binding:
  • Hardback
  • Pages:
  • 752
  • Published:
  • January 10, 2005
  • Edition:
  • 2
  • Dimensions:
  • 178x254x43 mm.
  • Weight:
  • 1496 g.
Delivery: 2-3 weeks
Expected delivery: November 23, 2024

Description of Nano- and Micro-Electromechanical Systems

Introduces concepts, methods, techniques, and technologies that are needed to solve a wide variety of problems related to high-performance nano- and micro systems. This book builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices.

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