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Nanofabrication Using Focused Ion and Electron Beams
- Principles and Applications
part of the Oxford Series in Nanomanufacturing series
- Binding:
- Hardback
- Pages:
- 840
- Published:
- May 23, 2012
- Dimensions:
- 193x259x47 mm.
- Weight:
- 2166 g.
Delivery:
2-3 weeks
Expected delivery: January 10, 2025
Extended return policy to January 30, 2025
Description of Nanofabrication Using Focused Ion and Electron Beams
This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
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