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Nanofabrication Using Focused Ion and Electron Beams

- Principles and Applications

part of the Oxford Series in Nanomanufacturing series

Nanofabrication Using Focused Ion and Electron Beams
About Nanofabrication Using Focused Ion and Electron Beams

This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.

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  • Language:
  • English
  • ISBN:
  • 9780199734214
  • Binding:
  • Hardback
  • Pages:
  • 840
  • Published:
  • May 23, 2012
  • Dimensions:
  • 193x259x47 mm.
  • Weight:
  • 2166 g.
Delivery: 2-3 weeks
Expected delivery: February 16, 2025

Description of Nanofabrication Using Focused Ion and Electron Beams

This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.

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