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Optical Inspection of Microsystems, Second Edition
- Binding:
- Hardback
- Pages:
- 570
- Published:
- June 24, 2019
- Edition:
- 2
- Dimensions:
- 262x188x30 mm.
- Weight:
- 1380 g.
Delivery:
2-3 weeks
Expected delivery: October 3, 2025
Description of Optical Inspection of Microsystems, Second Edition
This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.
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