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Particle Control for Semiconductor Manufacturing

About Particle Control for Semiconductor Manufacturing

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance.

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  • Language:
  • English
  • ISBN:
  • 9780824782429
  • Binding:
  • Hardback
  • Pages:
  • 480
  • Published:
  • January 25, 1990
  • Dimensions:
  • 178x254x27 mm.
  • Weight:
  • 1089 g.
Delivery: 2-3 weeks
Expected delivery: January 12, 2025

Description of Particle Control for Semiconductor Manufacturing

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance.

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