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Photonic MEMS Devices
- Design, Fabrication and Control
- Binding:
- Hardback
- Pages:
- 502
- Published:
- September 3, 2008
- Dimensions:
- 178x254x28 mm.
- Weight:
- 1090 g.
Delivery:
2-3 weeks
Expected delivery: March 20, 2025
Description of Photonic MEMS Devices
Covers various aspects of engineering innovation, design, modeling, fabrication, control, and experimental implementation of photonic MEMS devices. This text describes different photonic MEMS systems including devices with both component- and system-level photonic integration.
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