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Plasma-Assisted Atomic Layer Deposition of III-Nitride Thin Films

  • Language:
  • English
  • ISBN:
  • 9783659208232
  • Binding:
  • Paperback
  • Pages:
  • 180
  • Published:
  • March 16, 2014
  • Dimensions:
  • 229x152x10 mm.
  • Weight:
  • 272 g.
Delivery: 1-2 weeks
Expected delivery: December 12, 2024

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