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Process Variations in Microsystems Manufacturing
part of the Microsystems and Nanosystems series
- Binding:
- Hardback
- Pages:
- 521
- Published:
- April 10, 2020
- Edition:
- 12020
- Dimensions:
- 155x235x0 mm.
- Weight:
- 975 g.
Delivery:
2-3 weeks
Expected delivery: July 18, 2024
Description of Process Variations in Microsystems Manufacturing
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.
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