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Process Variations in Microsystems Manufacturing
part of the Microsystems and Nanosystems series
- Binding:
- Hardback
- Pages:
- 521
- Published:
- April 9, 2020
- Edition:
- 12020
- Dimensions:
- 155x235x0 mm.
- Weight:
- 975 g.
Delivery:
2-3 weeks
Expected delivery: January 10, 2025
Extended return policy to January 30, 2025
Description of Process Variations in Microsystems Manufacturing
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.
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