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Process Variations in Microsystems Manufacturing
part of the Microsystems and Nanosystems series
- Binding:
- Hardback
- Pages:
- 521
- Published:
- April 9, 2020
- Edition:
- 12020
- Dimensions:
- 155x235x0 mm.
- Weight:
- 975 g.
Delivery:
2-3 weeks
Expected delivery: December 5, 2024
Description of Process Variations in Microsystems Manufacturing
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps.
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