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About Rapid Thermal Processing

Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. This work talks about Rapid Thermal Processing.

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  • Language:
  • English
  • ISBN:
  • 9780080436128
  • Binding:
  • Hardback
  • Pages:
  • 356
  • Published:
  • March 16, 1999
  • Dimensions:
  • 210x279x0 mm.
  • Weight:
  • 580 g.
Delivery: 2-3 weeks
Expected delivery: January 19, 2025

Description of Rapid Thermal Processing

Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. This work talks about Rapid Thermal Processing.

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