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Science and Technology of Chemical Mechanical Planarization (CMP): Volume 1157
part of the MRS Proceedings series
- Binding:
- Hardback
- Pages:
- 165
- Published:
- March 30, 2010
- Dimensions:
- 155x235x14 mm.
- Weight:
- 370 g.
Delivery:
2-3 weeks
Expected delivery: January 25, 2025
Description of Science and Technology of Chemical Mechanical Planarization (CMP): Volume 1157
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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