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Silicon Carbide Microelectromechanical Systems For Harsh Environments
- Binding:
- Hardback
- Pages:
- 192
- Published:
- June 29, 2006
- Dimensions:
- 164x233x20 mm.
- Weight:
- 482 g.
Delivery:
2-4 weeks
Expected delivery: December 20, 2024
Extended return policy to January 30, 2025
Description of Silicon Carbide Microelectromechanical Systems For Harsh Environments
Describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. This book contains scientific information concerning SiC MEMS for harsh environments.
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