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Silicon Technologies

- Ion Implantation and Thermal Treatment

About Silicon Technologies

* Specifically in the field of microelectronics, the self-fulfilling power of Moore s Law has driven an amazing pace of technological advances * This book explains the fundamental physical and chemical rules in major front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion .

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  • Language:
  • English
  • ISBN:
  • 9781848212312
  • Binding:
  • Hardback
  • Pages:
  • 368
  • Published:
  • June 9, 2011
  • Dimensions:
  • 239x156x27 mm.
  • Weight:
  • 676 g.
Delivery: 2-4 weeks
Expected delivery: February 16, 2025

Description of Silicon Technologies

* Specifically in the field of microelectronics, the self-fulfilling power of Moore s Law has driven an amazing pace of technological advances * This book explains the fundamental physical and chemical rules in major front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion .

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