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Silicon Wet Bulk Micromachining for MEMS

  • Language:
  • English
  • ISBN:
  • 9789814613729
  • Binding:
  • Hardback
  • Pages:
  • 424
  • Published:
  • March 26, 2017
  • Dimensions:
  • 157x235x28 mm.
  • Weight:
  • 838 g.
Delivery: 2-4 weeks
Expected delivery: December 26, 2024
Extended return policy to January 30, 2025

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