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Toward Inertial-Navigation-on-Chip
- The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes
part of the Springer Theses series
- Binding:
- Paperback
- Pages:
- 127
- Published:
- September 24, 2020
- Edition:
- 2019
- Dimensions:
- 155x235x0 mm.
- Weight:
- 454 g.
Delivery:
2-4 weeks
Expected delivery: September 10, 2025
Description of Toward Inertial-Navigation-on-Chip
This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes.
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