Books in the Handbook of Sensors and Actuators series

Divided into ten sections, this book describes the principles and technology of Micro Mechanical Systems. It also provides an introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems.

Focusing on the scientific basis of the technique of semiconductor chemical sensors, this book concentrates on the usage of semiconductor sensors in precision physico-chemical studies. It explains the physical and chemical principles underlying the semiconductor sensor method. It is intended for scientists and engineers.

Focuses on developments in the instrumentation for sending voltages and currents. This book covers topics such as: measurements of biocurrents, the increased speed of the components for data taking, and, testing of computers and integrated circuits where the measurement of voltage and current variations on a small geometrical scale is necessary.