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Micro Mechanical Systems
- Principles and Technology
part of the Handbook of Sensors and Actuators series
- Binding:
- Hardback
- Pages:
- 276
- Published:
- July 23, 1998
- Dimensions:
- 175x244x19 mm.
- Weight:
- 670 g.
Delivery:
2-3 weeks
Expected delivery: March 30, 2025
Description of Micro Mechanical Systems
Divided into ten sections, this book describes the principles and technology of Micro Mechanical Systems. It also provides an introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems.
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