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Photomask Fabrication Technology

About Photomask Fabrication Technology

Describes the science and technology of industrial photomask production, including fundamental principles, industrial production flows, and technological evolution and development. This book focuses on industrial applications rather than pure science. It is suitable for engineers developing microelectronic manufacturing processes.

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  • Language:
  • English
  • ISBN:
  • 9780071445634
  • Binding:
  • Hardback
  • Pages:
  • 500
  • Published:
  • August 15, 2005
  • Dimensions:
  • 152x231x45 mm.
  • Weight:
  • 917 g.
Delivery: 2-4 weeks
Expected delivery: December 8, 2024

Description of Photomask Fabrication Technology

Describes the science and technology of industrial photomask production, including fundamental principles, industrial production flows, and technological evolution and development. This book focuses on industrial applications rather than pure science. It is suitable for engineers developing microelectronic manufacturing processes.

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