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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

About Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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  • Language:
  • English
  • ISBN:
  • 9783319762937
  • Binding:
  • Hardback
  • Pages:
  • 138
  • Published:
  • April 2, 2018
  • Edition:
  • 12018
  • Dimensions:
  • 155x235x0 mm.
  • Weight:
  • 3554 g.
Delivery: 2-3 weeks
Expected delivery: December 14, 2024

Description of Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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