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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
part of the NanoScience and Technology series
- Binding:
- Hardback
- Pages:
- 138
- Published:
- April 3, 2018
- Edition:
- 12018
- Dimensions:
- 155x235x0 mm.
- Weight:
- 3554 g.
Delivery:
2-3 weeks
Expected delivery: June 6, 2024
Description of Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
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