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Planar Waveguide Optical Sensors

- From Theory to Applications

About Planar Waveguide Optical Sensors

This book concentrates on the design and development of integrated optic waveguide sensors using silicon based materials. It gives the readers the full background in the field of sensors, reasons for using silicon oxynitride as a potential waveguide material as well as its fabrication processes and possible uses.

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  • Language:
  • English
  • ISBN:
  • 9783319817347
  • Binding:
  • Paperback
  • Pages:
  • 179
  • Published:
  • April 21, 2018
  • Edition:
  • 12016
  • Dimensions:
  • 155x235x0 mm.
  • Weight:
  • 3226 g.
Delivery: 1-2 weeks
Expected delivery: December 5, 2024

Description of Planar Waveguide Optical Sensors

This book concentrates on the design and development of integrated optic waveguide sensors using silicon based materials. It gives the readers the full background in the field of sensors, reasons for using silicon oxynitride as a potential waveguide material as well as its fabrication processes and possible uses.

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