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The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience.
Mechatronics has evolved to attack and solve a variety of engineering problems, and there appears to be no end to its application. This book presents a combination of traditional engineering topics and modern technologies, integrated to stimulate advances in the analysis and design of electromechanical systems.
Introduces concepts, methods, techniques, and technologies that are needed to solve a wide variety of problems related to high-performance nano- and micro systems. This book builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices.
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